Preprints
https://doi.org/10.5194/mr-2024-11
https://doi.org/10.5194/mr-2024-11
11 Jul 2024
 | 11 Jul 2024
Status: a revised version of this preprint is currently under review for the journal MR.

Integration of electrically detected magnetic resonance on a chip (EDMRoC) with charge pumping for low-cost and sensitive defect characterization in SiC MOSFETs

Jan Lettens, Marina Avramenko, Ilias Vandevenne, Anh Chu, Philipp Hengel, Michal Kern, Jens Anders, Peter Moens, Etienne Goovaerts, and Sofie Cambré

Abstract. Integration of microwave sources and detection circuits has led to the design of very compact electron paramagnetic resonance (EPR) instruments, so-called EPR on-a-chip (EPRoC). As recently demonstrated, this approach also offers opportunities for electrical detection of magnetic resonance (EDMR), a variant of EPR in which the magnetic resonance effect is detected via changes in the electrical properties of materials or devices. Here, we report the demonstration of EDMRoC on lateral SiC MOSFETs under charge pumping (CP) conditions. The detected CP current gives direct access to microscopic information about the recombination centers within the transistor gate inversion region under the gate dielectric. Efficient and selective microwave excitation of the region of interest of the device can be obtained by only modest modifications to both the MOSFET and the EPRoC electronic board. A comparative study between EDMRoC and a traditional resonant cavity configuration reveals comparable signal-to-noise ratios for CP-detected EDMR spectra. In addition to space- and cost-efficiency, EDMRoC offers alternative detection modes with scanning and modulation of the microwave frequency, as well as potentially easier sample mounting and exchange. We end with a discussion of the advantages, limitations, and perspectives of the EDMRoC set-up compared to EDMR in a conventional EPR spectrometer.

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Jan Lettens, Marina Avramenko, Ilias Vandevenne, Anh Chu, Philipp Hengel, Michal Kern, Jens Anders, Peter Moens, Etienne Goovaerts, and Sofie Cambré

Status: final response (author comments only)

Comment types: AC – author | RC – referee | CC – community | EC – editor | CEC – chief editor | : Report abuse
  • RC1: 'Comment on mr-2024-11', Anonymous Referee #1, 10 Aug 2024
    • AC1: 'Reply on RC1', Sofie Cambré, 20 Sep 2024
    • AC2: 'Reply on RC2', Sofie Cambré, 20 Sep 2024
  • RC2: 'Comment on mr-2024-11', Anonymous Referee #2, 12 Sep 2024
    • AC2: 'Reply on RC2', Sofie Cambré, 20 Sep 2024
    • AC1: 'Reply on RC1', Sofie Cambré, 20 Sep 2024
Jan Lettens, Marina Avramenko, Ilias Vandevenne, Anh Chu, Philipp Hengel, Michal Kern, Jens Anders, Peter Moens, Etienne Goovaerts, and Sofie Cambré
Jan Lettens, Marina Avramenko, Ilias Vandevenne, Anh Chu, Philipp Hengel, Michal Kern, Jens Anders, Peter Moens, Etienne Goovaerts, and Sofie Cambré

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Short summary
Demonstration of an ultra-compact spectrometer for electrically-detected magnetic resonance on a chip (EDMRoC) of silicon carbide MOSFETs with comparable signal-to-noise ratio as state-of-the-art conventional resonator-based EDMR. The relatively low cost, high sensitivity and limited space requirements of the EDMRoC configuration holds promise for application in basic and applied research as well as in industrial environments.